center of micronanotechnology ‐ epfl

Submit Demands Online

EPFL Center of MicroNanoTechnology Biography Since 1999 Philippe Flckiger is the Director of Operations at the EPFL Center of MicroNanoTechnology a world-class state-of-the-art cleanroom dedicated to research and development in the field of Micro and NanoFabrication The RLM419 and PhotoPro33 are two hot-roll laminators designed for applying dry film photo-resist sheets to a wide range of materials such as copper PCB laminates and stainless steel They can also apply for quick and easy wafers processing Contents

Picture of the Month – Honorable Runner

pBack to Winners 2020 July SunriseNicolas Mano LMIS4 As sun rises light reveals a forest of elegant trees on this wafer horizon The trees are formed from salt residues that dried up in a fractal fashion after photoresist development while the thin oxide layer gives this image its warm glow Plasmonic race carsAleksandrs Leitis Ming-Lun Tseng ()/p

To be read first: For DUV lithography process steps with the ASML PAS 5500/350C stepper CMi recommends to use wafers with the lowest possible total thickness variation (TTV2 μm) to reduce the impact of of high local thickness variations Wafers

The CMI's SEM LEO is exclusively reserved for imaging dedicated to the control of processes which have been done in the CMI by the regular CMI users RESERVATION POLICY: 2 booking slots maximum per day and per person (ie 1h) 6 booking slots

The CMI's SEM LEO is exclusively reserved for imaging dedicated to the control of processes which have been done in the CMI by the regular CMI users RESERVATION POLICY: 2 booking slots maximum per day and per person (ie 1h) 6 booking slots

CMI - Center of MicroNanoTechnology (68) CTS - Space Center (23) GR-SCI-STI - STI Scientists Group (276) IBI - Interfaculty Institute of Bioengineering (0) IBI-STI - Interfaculty Institute of Bioengineering (3 956) IEL - Institute of Electrical Engineering (13 076)

Scientific production and competences

CMI - Center of MicroNanoTechnology (68) CTS - Space Center (23) GR-SCI-STI - STI Scientists Group (276) IBI - Interfaculty Institute of Bioengineering (0) IBI-STI - Interfaculty Institute of Bioengineering (3 956) IEL - Institute of Electrical Engineering (13 076)

We report preliminary measurements of transient drain current undershoot with time constants of the order of milliseconds in thick and highly doped n-type junctionless fieldeffect transistors This effect might be attributed to a process involving generation of holes in the n-type-doped channel which can also explain the partial channel depletion as consequence of channel screening by an

The Future Circular Collider (FCC) is the envisioned particle accelerator to be installed in the Geneva area (Switzerland) It could achieve an energy of 100 TeV by colliding proton beams (FCC-hh) travelling through a 100 km tunnel Unprecedented radiation levels inside the FCC detectors will presumably exceed several tens of MGy with more than 10e17 particles/cm2 Current solid-state

The Center of MicroNanoTechnology is proud to present the 2018 Annual Review Meeting for MicroNanoFabrication The Networking Forum: - presenting research achievements of the past year - encouraging interaction among professors researchers students and

EPFL Center of MicroNanoTechnology Biography Since 1999 Philippe Flckiger is the Director of Operations at the EPFL Center of MicroNanoTechnology a world-class state-of-the-art cleanroom dedicated to research and development in the field of Micro and NanoFabrication

Philippe Renaud is Professor at the Microsystem Laboratory (LMIS4) at EPFL He is also the scientific director of the EPFL Center of MicroNanoTechnology (CMI) His main research area is related to micronano technologies in biomedical applications (BioMEMS) with emphasis on cell-chips nanofluidics and bioelectronics

Philippe Renaud is Professor at the Microsystem Laboratory (LMIS4) at the EPFL and scientific director of the EPFL Center of MicroNanoTechnology (CMI) His main research area is related to micronano-technologies in biomedical applications (BioMEMS) with emphasis on

Philippe Renaud is Professor at the Microsystem Laboratory (LMIS4) at EPFL He is also the scientific director of the EPFL Center of MicroNanoTechnology (CMI) His main research area is related to micronano technologies in biomedical applications (BioMEMS) with emphasis on cell-chips nanofluidics and bioelectronics

CMOS compatible fully integrated Mach

We present a fully integrated Mach-Zehnder interferometer in silicon-on- insulator technology Modulation of the index of refraction is achieved through the plasma dispersion effect resulting in a bandwidth in the 10 MHz range A particular and innovative design makes this device completely compatible with CMOS technology allowing electronic functions to be integrated on the same substrate

CMI - Center of MicroNanoTechnology (68) CTS - Space Center (23) GR-SCI-STI - STI Scientists Group (276) IBI - Interfaculty Institute of Bioengineering (0) IBI-STI - Interfaculty Institute of Bioengineering (3 956) IEL - Institute of Electrical Engineering (13 076)

Researchers at EPFL have shown that electromagnetic waves coupled to precisely engineered structures known as artificial ferromagnetic quasicrystals allow for more efficient information transmission and processing at the nanoscale Their research also represents the first practical demonstration of Conway worms a theoretical concept for the description of quasicrystals

pOur Mission: To provide basic and advanced training on processes and technologies To offer access to the processing equipment available in the clean room To gather to practice and to provide the most advanced know-how in the microtechnology field To cooperate with other academic institutions and research centers The CMi's offer addresses: Education Scientific research ()/p

Scientists from EPFL and the Russian Quantum Center have built a photonic integrated compact and portable soliton microcomb source The device is less than 1 cm3 in size and is driven by an on-chip indium phosphide laser consuming less than 1 Watt of electrical power It can be used in LIDAR data center interconnects and even satellites The study is published in Nature Communications

The RLM419 and PhotoPro33 are two hot-roll laminators designed for applying dry film photo-resist sheets to a wide range of materials such as copper PCB laminates and stainless steel They can also apply for quick and easy wafers processing Contents

2020/8/2Like many others during the confinement we discovered our green fingers and started to grow fresh vegetables in the backyard After some failed attempts we discovered that this micro-broccoli grows surprisingly well at 1050 C! Picture is an SEM image of GaN crystals grown on a patterned silicon

The researchers would like to thank EPFL's Center of MicroNanoTechnology (CMi) for its process engineering expertise and technical support particularly concerning the atomic force microscope The study received funding from the European Research Council (ERC) under the European Union's Horizon 2020 research and innovation program ("MEMS 4 0" project)

Center of MicroNanoTechnology (ENT‐R CMi) Other service Other Access tools Operator support 3 service 33 ‐ ‐ 58'739 53'113 45'515 28'912 6'708 87'651 59'821 45'515 51'054 131'683 168'361 20'571 371'669 57'750 36'050 33'584 9'719 6'067 6'554 11'041

To be read first: Each user/lab has to have at least one box of CMI compatible tips (ScanAsyst Fluid+ Fastscan A or Fastscan C) Each user has to know how to replace a AFM tip Each user has to leave the AFM with a fonctional AFM tip in place among the

The Center of MicroNanoTechnology is proud to present the 2018 Annual Review Meeting for MicroNanoFabrication The Networking Forum: - presenting research achievements of the past year - encouraging interaction among professors researchers students and

To be read first: For DUV lithography process steps with the ASML PAS 5500/350C stepper CMi recommends to use wafers with the lowest possible total thickness variation (TTV2 μm) to reduce the impact of of high local thickness variations Wafers

Using integrated photonic chips fabricated at EPFL scientists have demonstrated laser-based microwave generators These microwave signals as well as their optical carriers could be used in radars satellite communications and future 5G wireless networks